Acceleration Sensor MS 2002+

Data sheet MS2002+ Acceleration Sensor The well proven technology of silicon micromachined capacitive sensors has been fur- ther improved by optimizing the sensor structure. Integration of electronics into an application spe- cific IC results in a small high precision accelero- meter which shows environmental and reliability performance similar to integrated circuits. This accelerometer, built as triaxial device, suits ideally into seismic instrumentation. The DC cou- pled output in combination with the very low short- and long-term drift provides true engineering data that require no post-processing. The micromachined capacitive accelerometer has become an attractive alternative against tradition- ally used FBA’s. It’s small dimensions, rugged construction and excellent reliability makes it especially suitable for unattended free-field instru- ments and instrumentation of structures, such as nuclear power plants, dams and seismic alerting systems. The sensors are factory calibrated and require no re-calibration. They are equipped with a fully comprehensive self-test function. Technical Specification MS2002+ 1. Performance a Principle The acceleration sensing element is based on a micromechanical silicon chip, an ASIC for signal conditioning, and an EEPROM for storage of the calibration data. The micromechanical capacitive chip is manufactured using a 3-wafer silicon bulk-micromachining fusion bonding process. The signal conditioning IC translates the capacitance variation of the sensor chip into a calibrated output voltage. The gain, offset and nonlinearity corrections are programmed digitally during manufacturing. a Offset (at 0g) 2.5 V ± 200 µV/°C a Cross axis sensitivity 0.030 V/g a Hysteresis none a Noise typ. 10 µV/√Hz a Orientation triaxial, horizontal (floor) mounting or vertical (wall) mounting a Non-Linearity < 0.5 % of full scale a Frequency response linear 0 to 150 Hz (accuracy ±1%) a Dynamic range (RMS) > 84 dB (DC to 50 Hz) a Shock survival 6000 g (0.5 ms half sine) a Vibration survival 20 g RMS (random noise 20-500 Hz, 30 minutes) a Operating temperature - 30 to 70°C 1.1 MS2002+ triaxal Sensor (unipolar) a Measuring range ±1g a Sensitivity 2 V/g ± 400 ppm/°C a Supply voltage + 12 V (+10 % / -30 %) a Current consumption typ. 6 mA @ 12 V a Output voltage 2.5 V ±2V 1.2 MS2002+ triaxial Sensor (bipolar) a Measuring range ± 2 g / ± 10 g a Sensitivity 1 V/g (2 g sensor), 0.2 V/g (10 g sensor) a Supply voltage ± 5 V (± 5%) a Current consumption typ. 6 mA @ 5V, 4 mA @ -5 V a Output voltage 0V ±2V 2. Physical Characteristics a Housing Aluminum, 80 x 80 x 60 mm (W x L x H) a Connector Metallic self-latching push-pull connector with positioning key (LEMO) a Weight 0.5 kg a Protection degree IP 67 a Optional mounted inside MR2002 recorder Manufacturer: MS2002.04.2001 Syscom Instruments AG Telefon +41 (1) 3 65 27 00 Imfeldstrasse 29 Fax +41 (1) 3 62 06 50 CH-8037 Zürich/Switzerland E-mail: info@syscom.ch A member of the BARTEC Group www.syscom.ch